Micro- and nanosystems

https://w3id.org/kdsf-ffk/476

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Scope Note

Research on technologies or methods which deal with structures and processes at the micro and nano scale

Example

Microtechnology, microsystem solutions, microsystem technology, microelectronics, micromanufacturing, nanostructure, nanomedicine, nano safety, nanoscale system, nanomaterial, nanotechnology, submicrometer technology, submicron technology, nanostructure technology